alert icon

Internet Explorer 8 or 9 is not supported by this website. Please either update your version of Internet Explorer, or use a more up to date browser.

Hide Message hide icon

High Purity

High Purity Filter

High Purity Filters

  • Meet stringent ultrahigh-purity gas system filtering requirements of SEMI E49.8-96 (SCF series)
  • Have inline, all-welded construction (FW Series)

All-Welded Inline Filters (FW Series)


Working Pressure Up to 6000 psig (413 bar)
Differential Pressure Up to 600 psi (41.3 bar)
Temperature –20 to 900°F (–28 to 482°C)
Body Material 316 stainless steel
Material Sintered 316L stainless steel or pleated mesh stainless steel
Nominal Pore Size 0.5 through 15 µm
End Connections
Type Swagelok tube fitting, NPT, VCR® face seal fittings
Size 1/4 in.; 6 mm

Ultrahigh-Purity (UHP) Gas Filters (SCF Series)


Working Pressure Up to 3000 psig (206 bar)
Differential Pressure Up to 145 psi (10 bar)
Temperature Up to 122°F (50°C)
Maximum Flow Rate 2700 std L/min
Body Material 316L VAR stainless steel
Internal Surface Finish Electropolished, 5 µin (0.13 µm) Ra
Material High-purity alumina
Removal Rating > 99.999999 % at 0.003 µm
End Connections
Type VCR face seal fittings
Size 1/4, 1/2, and 3/4 in.

View and purchase our most widely used products.

Discover more about how Swagelok products can work for you. Browse our catalogs or locate a sales and service center.

Safe Product Selection: The complete catalog contents must be reviewed to ensure that the system designer and user make a safe product selection. When selecting products, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user.

⚠ Warning: Do not mix/interchange Swagelok products or components not governed by industrial design standards, including Swagelok tube fitting end connections, with those of other manufacturers.